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정성준

Email
jeong.seongjun@ssu.ac.kr
Office
연구관 208호
Phone
02-828-7044
Fax
02-817-8349
Homepage

학력 

- KAIST 신소재공학과 공학박사

- KAIST 신소재공학과 공학석사

- 울산대학교 재료금속공학부 공학사

      

경력 및 활동사항 

- 현재) International Microprocesses &Nanotechnology Conference,

Resist& DSA Session, Sub-Head

- 현재)한국반도체학술대회,나노과학기술분과,분과위원

- 2016 세계과학한림원 서울포럼(한국과학기술한림원),최우수 젊은과학자 그룹 멤버

- 2015~2017 한국반도체학술대회,나노과학기술분과,공동분과위원장

- 2014~2015 차세대리소그라피 학술대회, DSA분과,편집위원 

 

- 현재)숭실대학교 유기신소재파이버공학과,조교수

- 2011~2018 삼성전자 종합기술원, Device& System Center,전문연구원

- 2010~2011 UC Berkeley, 재료공학과,박사후연구원

- 2010~2010 KAIST, 응용공학연구소,박사후연구원

      

관심 연구분야


1. 차세대 나노리소그라피 공정기술 개발

- DSA (Directed Self Assembly) Nanolithography

- Flexible Nanolithography

 

2. 저차원 반도체소재 합성 및 소자 응용

- Synthesis of two-dimensional materials, including MoS2, WS2, SnSe2, SnS2, and TaS2

 

3. 반도체 박막소재 및 공정 개발 (by using ALD)

- High-k Gate Dielectrics

- DRAM Diffusion Barrier

 

4. 차세대 웨어러블 공정 및 소자개발

- Flexible Nanopatterning Process for Wearable Electronics

- Flexible Nanogenerators and Sensors

 

 

대표 연구실적

논문 (Selected) 

1. “Wafer-scale synthesis of reliable high-mobility molybdenum disulfide thin films via inhibitor-utilizing atomic layer deposition" Advanced Materials, 29, 1703031, (2017). (Selected as a Front Cover: December 20, 2017).(SCI; IF=19.791)

2. “Flash Light Millisecond Self-Assembly of High χ Block Copolymers for Wafer-Scale Sub-10 nm Nanopatterning” Advanced Materials, 29(32), 1700595, (2017).(SCI; IF=19.791)

3. “Self-Aligned Multi-Channel Graphene Nanoribbon Transistor Arrays Fabricated at Wafer-Scale”, Nano Letters, 16 (9), pp 5378, (2016).(SCI; IF=12.712)

4. “Complex High Aspect Ratio Metal Nanostructures by Secondary Sputtering Phenomenon Combined with Block Copolymer Self-Assembly” Advanced Materials, 28(38), 8439, (2016).(SCI; IF=19.791)

5. “Mesostructured HfxAlyO2 Thin Films as Reliable and Robust Gate Dielectrics with Tunable Dielectric Constants for High-Performance Graphene-Based Transistors” ACS Nano, 10 (7), pp 6659, (2016).(SCI; IF=13.942)