SEM

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Model: CX-100S

Resolution	3.0nm (30kV, SE image) 10.0nm (3kV, SE image)
Magnification	x100 ~ x300,000
Objective IRIS	Variable aperture with 4 different diameters (30um,50um,100um,200um)
Image Shift	±50um
Stage	Manual Stage, X: 40mm, Y: 40mm, Z: 5~50mm, T: -20°~90°, R:360°
Sample Size	Horizontal: 130mm, Vertical: 60mm
Display Mode	Reduced window mode: 320 x 240 pixel TV screen scan mode: 640 x 480 pixel Slow screen scan mode: 640 x 480 pixel (3steps) Photo screen capture mode 1: 1280 x 960 pixel Photo screen capture mode 2: 2560 x 1920 pixel Waveform observation mode
Vacuum system	Turbo molecular pump(3분 이내 진공가능) Rotary pump
Optional Detector	EDS(Energy dispersive spectroscopy WDS(Wavelength dispersive spectroscopy) BSE(Backscattered Electron) EBSD( Electron Back Scattered Diffraction)
Dimension & Weight	Main system: 770(W)x880(D)x1500(H)mm, 350kg